机读格式显示(MARC)

• 000 01395pam 2200325 a 4500

• 001 0000514935

• 005 20050405173800.0

• 008 050405s1989 paua b 101 0 eng

• 010 __ |a 89033789

• 020 __ |a 0803112734

• 035 __ |a 9(DLC) 89033789

• 040 __ |a DLC |c DLC |d DLC

• 050 00 |a TK7871.85 |b .S4617 1989

• 082 00 |a 621.381/52 |2 20

• 090 __ |a TN3/S471

• 093 __ |a TN3 |2 4

• 245 00 |a Semiconductor fabrication : |b technology and metrology / |c Dinesh C. Gupta, editor.

• 260 __ |a Philadelphia, PA : |b ASTM, |c c1989.

• 300 __ |a 476 p. : |b ill. ; |c 24 cm.

• 490 1_ |a STP ; |v 990

• 500 __ |a Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.

• 500 __ |a "ASTM publication code number (PCN) 04-990000-46"--T.p. verso.

• 504 __ |a Includes bibliographical references and indexes.

• 650 _0 |a Semiconductors |x Design and construction |x Congresses.

• 700 1_ |a Gupta, D. C. |q (Dinesh C.)

• 710 2_ |a ASTM Committee F-1 on Electronics.

• 710 2_ |a Semiconductor Equipment and Materials Institute.

• 711 2_ |a Symposium on Semiconductor Processing |n (5th : |d 1988 : |c Santa Clara, Calif.)

• 830 _0 |a ASTM special technical publication ; |v 990.

• 950 __ |a JHUL |b TN3 |c S471