机读格式显示(MARC)

• 000 00788nam 2200217 4500

• 001 0000499324

• 003 CAL

• 005 20050310083600.0

• 008 050310s1981 sz a 100 0 eng

• 040 __ |c SJT

• 041 0_ |a eng

• 090 __ |a TN405.7-53/I61

• 093 __ |a TN405.7-53 |2 4

• 099 __ |a CALB022000340349

• 111 2_ |a International Conference on Microlithography |d (1981 : |c Lausanne, Switzerland)

• 245 10 |a Microcircuit engineering 81 : |b proceedings of the ... / |c compiled by Albertus Oosenbrug ; organized by Swiss Federal Institute of Technology Lausanne.

• 260 __ |a Lausanne : |b Swiss Federal Institute of Technology, |c c1981

• 300 __ |a 546 p. : |b ill. ; |c 24 cm.

• 700 1_ |a Oosenbrug, Albertus.

• 710 2_ |a Ecole polytechnique federale de Lausanne.

• 950 __ |a JHUL |b TN405.7-53 |c I61