机读格式显示(MARC)
- 000 01096nam a2200265 a 4500
- 008 130123s2012 cc a b 000 0 eng d
- 100 1_ |a Andrews, David L.
- 245 10 |a Nanofabrication and devices = |b 纳米加工和器件 / |c David L. Andrews, Gregory D. Scholes, Gary P. Wiederrecht.
- 260 __ |a 北京 : |b 科学出版社, |c 2012.
- 300 __ |a xxi, 630 p. ; |c 27 cm.
- 490 0_ |a 科爱传播·纳米科学与技术大全 |v 4
- 504 __ |a Includes bibliographical references (p. 629-630).
- 520 __ |a This book includes: used for scanning probe lithography technology of biological and organic nanostructures on the surface of nanometer structure; technique for electron beam exposure; submicron soft lithography; UV imprint lithography technology in nanometer process development.
- 650 _0 |a Nanomaterials |x Processing.
- 700 0_ |a Scholes, Gregory D.
- 700 0_ |a Wiederrecht, Gary P.
- 950 __ |a JHUD |b TB383 |c A565N