机读格式显示(MARC)
- 000 00633nam a2200229 a 4500
- 008 121203s2011 cc a i 001 0 eng d
- 245 10 |a Foundations of mems (2nd Edition) = |b 微机电系统基础 (第二版) / |c Chang Liu著.
- 260 __ |a 北京 : |b 机械工业出版社, |c 2011.
- 300 __ |a 576 p. : |b ill. ; |c 24 cm.
- 504 __ |a Includes index.
- 950 __ |a JHUD |b TM38 |c C456