机读格式显示(MARC)
- 000 01146nam a2200277 a 4500
- 008 130117s2011 cc a bi 001 0 eng d
- 100 1_ |a Zhou, Zhaoying(周兆英).
- 245 10 |a Microsystems and nanotechnology = |b 微系统和纳米技术 / |c Zhaoying zhou, Zhonglin Wang, Liwei Lin.
- 260 __ |a 北京 : |b 清华大学出版社, |c 2011.
- 300 __ |a xxii, 1004 p. :
|b ill. ;
|c 24 cm.
- 504 __ |a Includes bibliographical references (p. 928-929).
- 520 __ |a is book describes the research situation about MEMS and nanotechnology science and engineering as well as the achievement.The book has 23 chapters, from basic, micro systems and nanotechnology microsystems technology, nanotechnology, application, development and Prospect of several aspects of narrative.
- 650 _0 |a Nanometer material.
- 650 _0 |a Microelectronic technology.
- 700 0_ |a Wang, Zhonglin(王中林).
- 700 0_ |a Lin, Liwei(林立伟).
- 950 __ |a JHUD |b TB383 |c Z63M