机读格式显示(MARC)

• 000 00914cas 2200277 a 4500

• 001 0000450261

• 003 CAL

• 005 20041120122700.0

• 008 041120c19929999nyuqr1p r^bi 0 uua0eng d

• 022 0_ |a 1057-7157

• 040 __ |c SJT

• 090 __ |a TN3/W1

• 093 __ |a TN3 |2 4

• 098 __ |a 730B01-JMS

• 099 __ |a CAL 121999030941

• 245 00 |a Journal of microelectromechanical systems / |c IEEE and ASME.

• 260 __ |a New York, NY : |b the Institute of Electrical and Electronics Engineers, |c c1992-

• 300 __ |a v. : |b ill. ; |c 26 cm.

• 310 __ |a Quarterly(4/y)

• 362 0_ |a Vol. 1, no. 1 (Mar. 1992)-

• 504 __ |a Includes bibliographies reference and index.

• 530 __ |a Also available in microfiche and microform.

• 710 20 |a American Society of Mechanical Engineers.

• 710 20 |a IEEE Electron Devices Society. eers

• 905 __ |a 242450 |b 1057-7157 |c TN3 |i v. 1, no. 1 1992-v. 3, no. 1-4 1994 |z 2

• 998 __ |a SJT