机读格式显示(MARC)

• 000 01841aam 2200397 a 4500

• 001 0000508196

• 003 CAL

• 005 20050330084700.0

• 008 050330s1991 nyua rb 100 0 eng

• 010 __ |a 90085702

• 020 __ |a 087942642X (lib. bdg.)

• 020 __ |a 0879426411 (softbound)

• 020 __ |a 0879426438 (microfiche)

• 040 __ |a DLC |c DLC

• 050 00 |a TK153 |b .I33 1991

• 082 00 |a 621.3 |2 20

• 090 __ |a TM38-532/I22

• 093 __ |a TM38-532 |2 4

• 099 __ |a CAL 022000231008 |a CAL 022000893409

• 245 00 |a IEEE micro electro mechanical systems : |b an investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991 / |c sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division.

• 260 __ |a New York : |b Institute of Electrical and Electronics Engineers, |c c1991.

• 300 __ |a xiv, 288 p. : |b ill. ; |c 29 cm.

• 500 __ |a "The Fourth IEEE Workshop on Micro Electro Mechanical Systems (MEMS '91)"--P. iii.

• 500 __ |a Cover title: IEEE micro electro mechanical systems, 1991.

• 500 __ |a "IEEE catalog number: 91CH2957-9"--Label on verso of t.p.

• 504 __ |a Includes bibliographical references and indexes.

• 610 20 |a Denki Gakkai (1988)

• 610 20 |a American Society of Mechanical Engineers. |b Dynamic Systems and Control Division.

• 650 _0 |a Electromechanical devices |x Congresses.

• 650 _0 |a Miniature objects |x Congresses.

• 650 _0 |a Microelectronics |x Congresses.

• 650 _0 |a Robotics |x Congresses.

• 710 2_ |a IEEE Robotics and Automation Society.

• 711 2_ |a IEEE Workshop on Micro Electro Mechanical Systems |n (4th : |d 1991 : |c Nara-shi, Japan)

• 740 0_ |a IEEE micro electro mechanical systems, 1991.

• 950 __ |a JHUL |b TM38-532 |c I22