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西文图书1.Microcircuit engineering 81 : proceedings of the ... / TN405.7-53/I61
馆藏复本:1
可借复本:1 International Conference on Microlithography
Swiss Federal Institute of Technology, c1981
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西文图书2.Microcircuit engineering / TN4/M626
馆藏复本:1
可借复本:1 edited by H. Ahmed and W. C. Nixon.
Cambridge University Press, 1980.
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