MARC状态：审校 文献类型：西文图书 浏览次数：21
- 题名/责任者:
- Microcircuit engineering 81 : proceedings of the ... / compiled by Albertus Oosenbrug ; organized by Swiss Federal Institute of Technology Lausanne.
- 出版发行项:
- Lausanne : Swiss Federal Institute of Technology, c1981
- 载体形态项:
- 546 p. : ill. ; 24 cm.
- 会议名称:
- International Conference on Microlithography (1981 : Lausanne, Switzerland)
- 附加个人名称:
- Oosenbrug, Albertus.
- 中图法分类号:
- TN405.7-53
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