MARC状态：审校 文献类型：西文图书 浏览次数：13
- 题名/责任者:
- Microsystems and nanotechnology = 微系统和纳米技术 / Zhaoying zhou, Zhonglin Wang, Liwei Lin.
- 出版发行项:
- 北京 : 清华大学出版社, 2011.
- ISBN:
- 9787302243076
- 载体形态项:
- xxii, 1004 p. : ill. ; 24 cm.
- 变异题名:
- 微系统和纳米技术
- 个人责任者:
- Zhou, Zhaoying(周兆英).
- 附加个人名称:
- Wang, Zhonglin(王中林).
- 附加个人名称:
- Lin, Liwei(林立伟).
- 论题主题:
- Nanometer material.
- 中图法分类号:
- TB383
- 中图法分类号:
- TN4
- 书目附注:
- Includes bibliographical references (p. 928-929).
- 摘要附注:
- is book describes the research situation about MEMS and nanotechnology science and engineering as well as the achievement.The book has 23 chapters, from basic, micro systems and nanotechnology microsystems technology, nanotechnology, application, development and Prospect of several aspects of narrative.
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