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Online Public Access Catalogue

题名/责任者:

Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor.

出版发行项:

Philadelphia, PA : ASTM, c1989.

ISBN:

0803112734

载体形态项:

476 p. : ill. ; 24 cm.

丛编说明:

STP ; 990

丛编统一题名:

ASTM special technical publication ; 990.

附加个人名称:

Gupta, D. C. (Dinesh C.)

附加团体名称:

ASTM Committee F-1 on Electronics.

附加团体名称:

Semiconductor Equipment and Materials Institute.

附加会议名称:

Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.)

论题主题:

Semiconductors-Design and construction-Congresses.

中图法分类号:

TN3

一般附注:

Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.

一般附注:

"ASTM publication code number (PCN) 04-990000-46"--T.p. verso.

书目附注:

Includes bibliographical references and indexes.

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