MARC状态：审校 文献类型：西文图书 浏览次数：29
- 题名/责任者:
- Nanofabrication and devices = 纳米加工和器件 / David L. Andrews, Gregory D. Scholes, Gary P. Wiederrecht.
- 出版发行项:
- 北京 : 科学出版社, 2012.
- ISBN:
- 9787030346599
- 载体形态项:
- xxi, 630 p. ; 27 cm.
- 变异题名:
- 纳米加工和器件
- 丛编说明:
- 科爱传播·纳米科学与技术大全 4
- 个人责任者:
- Andrews, David L.
- 附加个人名称:
- Scholes, Gregory D.
- 附加个人名称:
- Wiederrecht, Gary P.
- 论题主题:
- Nanomaterials-Processing.
- 中图法分类号:
- TB383
- 书目附注:
- Includes bibliographical references (p. 629-630).
- 摘要附注:
- This book includes: used for scanning probe lithography technology of biological and organic nanostructures on the surface of nanometer structure; technique for electron beam exposure; submicron soft lithography; UV imprint lithography technology in nanometer process development.
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