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题名/责任者:

IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991 / sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division.

出版发行项:

New York : Institute of Electrical and Electronics Engineers, c1991.

ISBN:

087942642X (lib. bdg.)

ISBN:

0879426411 (softbound)

ISBN:

0879426438 (microfiche)

载体形态项:

xiv, 288 p. : ill. ; 29 cm.

附加非控制题名:

IEEE micro electro mechanical systems, 1991.

附加团体名称:

IEEE Robotics and Automation Society.

附加会议名称:

IEEE Workshop on Micro Electro Mechanical Systems (4th : 1991 : Nara-shi, Japan)

团体名称主题:

Denki Gakkai (1988)

团体名称主题:

American Society of Mechanical Engineers.-Dynamic Systems and Control Division.

论题主题:

Electromechanical devices-Congresses.

论题主题:

Miniature objects-Congresses.

论题主题:

Microelectronics-Congresses.

论题主题:

Robotics-Congresses.

中图法分类号:

TM38-532

一般附注:

"The Fourth IEEE Workshop on Micro Electro Mechanical Systems (MEMS '91)"--P. iii.

一般附注:

Cover title: IEEE micro electro mechanical systems, 1991.

一般附注:

"IEEE catalog number: 91CH2957-9"--Label on verso of t.p.

书目附注:

Includes bibliographical references and indexes.

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